kla's sensarray ® products enable in situ monitoring of process tools' environments and wafer handling conditions.
With wireless sensor wafers and an automation package,.
Key Overview & Analysis
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sensarray automation provides productivity enhancements resulting from gains in process tool availability, more efficient use of engineering resources and centralized data storage.
flashes red during booting, flashes green when operational.
Toggles between red and green when the “locate” function is active.
The sensarray gpio port provides for.
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